ELECTRON-CYCLOTRON RESONANCE PLASMA CHEMICAL VAPOR-DEPOSITION OF LARGE AREA UNIFORM SILICON-NITRIDE FILMS. / SHAPOVAL, S Y ; Petrashov, Victor; POPOV, O A ; YODER, M D ; MACIEL, P D ; LOK, C K C .

In: JOURNAL OF VACUUM SCIENCE, Vol. 9, No. 6, 1991, p. 3071-3077.

Research output: Contribution to journalArticle

Published
Original languageEnglish
Pages (from-to)3071-3077
Number of pages7
JournalJOURNAL OF VACUUM SCIENCE
Volume9
Issue number6
Publication statusPublished - 1991

ID: 578093