ELECTRON-CYCLOTRON RESONANCE PLASMA CHEMICAL VAPOR-DEPOSITION OF LARGE AREA UNIFORM SILICON-NITRIDE FILMS

S Y SHAPOVAL, Victor Petrashov, O A POPOV, M D YODER, P D MACIEL, C K C LOK

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)3071-3077
Number of pages7
JournalJOURNAL OF VACUUM SCIENCE
Volume9
Issue number6
Publication statusPublished - 1991

Keywords

  • CVD METHOD
  • STREAM SOURCE
  • HYDROGEN

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