Original language | English |
---|---|
Pages (from-to) | 3071-3077 |
Number of pages | 7 |
Journal | JOURNAL OF VACUUM SCIENCE |
Volume | 9 |
Issue number | 6 |
Publication status | Published - 1991 |
Keywords
- CVD METHOD
- STREAM SOURCE
- HYDROGEN
S Y SHAPOVAL, Victor Petrashov, O A POPOV, M D YODER, P D MACIEL, C K C LOK
Research output: Contribution to journal › Article › peer-review
Original language | English |
---|---|
Pages (from-to) | 3071-3077 |
Number of pages | 7 |
Journal | JOURNAL OF VACUUM SCIENCE |
Volume | 9 |
Issue number | 6 |
Publication status | Published - 1991 |