Anodically bonded submicron microfluidic chambers. / Dimov, S.; Bennett, R. G. ; Córcoles, A.; Levitin, L. V.; Ilic, B.; Verbridge, S. S.; Saunders, J.; Casey, A.; Parpia, J. M.

In: Review of Scientific Instruments, Vol. 81, No. 1, 013907, 29.01.2010.

Research output: Contribution to journalArticlepeer-review

Published

Standard

Anodically bonded submicron microfluidic chambers. / Dimov, S.; Bennett, R. G. ; Córcoles, A.; Levitin, L. V.; Ilic, B.; Verbridge, S. S.; Saunders, J.; Casey, A.; Parpia, J. M.

In: Review of Scientific Instruments, Vol. 81, No. 1, 013907, 29.01.2010.

Research output: Contribution to journalArticlepeer-review

Harvard

Dimov, S, Bennett, RG, Córcoles, A, Levitin, LV, Ilic, B, Verbridge, SS, Saunders, J, Casey, A & Parpia, JM 2010, 'Anodically bonded submicron microfluidic chambers', Review of Scientific Instruments, vol. 81, no. 1, 013907. https://doi.org/10.1063/1.3291107

APA

Dimov, S., Bennett, R. G., Córcoles, A., Levitin, L. V., Ilic, B., Verbridge, S. S., Saunders, J., Casey, A., & Parpia, J. M. (2010). Anodically bonded submicron microfluidic chambers. Review of Scientific Instruments, 81(1), [013907]. https://doi.org/10.1063/1.3291107

Vancouver

Dimov S, Bennett RG, Córcoles A, Levitin LV, Ilic B, Verbridge SS et al. Anodically bonded submicron microfluidic chambers. Review of Scientific Instruments. 2010 Jan 29;81(1). 013907. https://doi.org/10.1063/1.3291107

Author

Dimov, S. ; Bennett, R. G. ; Córcoles, A. ; Levitin, L. V. ; Ilic, B. ; Verbridge, S. S. ; Saunders, J. ; Casey, A. ; Parpia, J. M. / Anodically bonded submicron microfluidic chambers. In: Review of Scientific Instruments. 2010 ; Vol. 81, No. 1.

BibTeX

@article{5ff19bf9757240229c3031e429b0f4a5,
title = "Anodically bonded submicron microfluidic chambers",
keywords = "anodisation, electrodes, microfluidics, silicon, silicon compounds, SUPERFLUID HE-3, SURFACES, SILICON",
author = "S. Dimov and Bennett, {R. G.} and A. C{\'o}rcoles and Levitin, {L. V.} and B. Ilic and Verbridge, {S. S.} and J. Saunders and A. Casey and Parpia, {J. M.}",
year = "2010",
month = jan,
day = "29",
doi = "10.1063/1.3291107",
language = "English",
volume = "81",
journal = "Review of Scientific Instruments",
issn = "0034-6748",
publisher = "American Institute of Physics Publising LLC",
number = "1",

}

RIS

TY - JOUR

T1 - Anodically bonded submicron microfluidic chambers

AU - Dimov, S.

AU - Bennett, R. G.

AU - Córcoles, A.

AU - Levitin, L. V.

AU - Ilic, B.

AU - Verbridge, S. S.

AU - Saunders, J.

AU - Casey, A.

AU - Parpia, J. M.

PY - 2010/1/29

Y1 - 2010/1/29

KW - anodisation

KW - electrodes

KW - microfluidics

KW - silicon

KW - silicon compounds

KW - SUPERFLUID HE-3

KW - SURFACES

KW - SILICON

U2 - 10.1063/1.3291107

DO - 10.1063/1.3291107

M3 - Article

VL - 81

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

SN - 0034-6748

IS - 1

M1 - 013907

ER -