@article{5ff19bf9757240229c3031e429b0f4a5,
title = "Anodically bonded submicron microfluidic chambers",
keywords = "anodisation, electrodes, microfluidics, silicon, silicon compounds, SUPERFLUID HE-3, SURFACES, SILICON",
author = "S. Dimov and Bennett, {R. G.} and A. C{\'o}rcoles and Levitin, {L. V.} and B. Ilic and Verbridge, {S. S.} and J. Saunders and A. Casey and Parpia, {J. M.}",
year = "2010",
month = jan,
day = "29",
doi = "10.1063/1.3291107",
language = "English",
volume = "81",
journal = "Review of Scientific Instruments",
issn = "0034-6748",
publisher = "American Institute of Physics Publising LLC",
number = "1",
}