Original language | English |
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Pages (from-to) | 126-128 |
Number of pages | 3 |
Journal | TECHNICAL PHYSICS |
Volume | 43 |
Issue number | 1 |
Publication status | Published - Jan 1998 |
Influence of electron irradiation of the NOVER-1 vacuum resist on its resistance to ion-beam etching
Y I Koval, Victor Petrashov
Research output: Contribution to journal › Article › peer-review