Fabrication of microfluidic cavities using Si-to-glass anodic bonding

N. Zhelev, T. S. Abhilash, R. G. Bennett, E. N. Smith, B. Ilic, J. M. Parpia, L. V. Levitin, X. Rojas, A. Casey, J. Saunders

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Article number073902
Pages (from-to)1-10
Number of pages10
JournalReview of Scientific Instruments
Issue number7
Early online date13 Jul 2018
Publication statusPublished - 2018

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