CUBIC BORON-NITRIDE FILMS DEPOSITED BY ELECTRON-CYCLOTRON RESONANCE PLASMA

S Y SHAPOVAL, Victor Petrashov, O A POPOV, A O WESTNER, M D YODER, C K C LOK

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)1093-1097
Number of pages5
JournalNEW DIAMOND SCIENCE AND TECHNOLOGY
Publication statusPublished - 1991

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