CUBIC BORON-NITRIDE FILMS DEPOSITED BY ELECTRON-CYCLOTRON RESONANCE PLASMA. / SHAPOVAL, S Y ; Petrashov, Victor; POPOV, O A ; WESTNER, A O ; YODER, M D ; LOK, C K C .

In: NEW DIAMOND SCIENCE AND TECHNOLOGY, 1991, p. 1093-1097.

Research output: Contribution to journalArticle

Published
Original languageEnglish
Pages (from-to)1093-1097
Number of pages5
JournalNEW DIAMOND SCIENCE AND TECHNOLOGY
Publication statusPublished - 1991

ID: 577999