Nanofabrication using self-narrowing atomic beams. / Petrashov, Victor.

In: MICROELECTRONIC ENGINEERING, Vol. 35, No. 1-4, 02.1997, p. 357-359.

Research output: Contribution to journalArticle

Published
Original languageEnglish
Pages (from-to)357-359
Number of pages3
JournalMICROELECTRONIC ENGINEERING
Volume35
Issue number1-4
Publication statusPublished - Feb 1997

ID: 577300