Influence of electron irradiation of the NOVER-1 vacuum resist on its resistance to ion-beam etching

Y I Koval, Victor Petrashov

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)126-128
Number of pages3
JournalTECHNICAL PHYSICS
Volume43
Issue number1
Publication statusPublished - Jan 1998

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