Influence of electron irradiation of the NOVER-1 vacuum resist on its resistance to ion-beam etching. / Koval, Y I ; Petrashov, Victor.

In: TECHNICAL PHYSICS, Vol. 43, No. 1, 01.1998, p. 126-128.

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Influence of electron irradiation of the NOVER-1 vacuum resist on its resistance to ion-beam etching. / Koval, Y I ; Petrashov, Victor.

In: TECHNICAL PHYSICS, Vol. 43, No. 1, 01.1998, p. 126-128.

Research output: Contribution to journalArticlepeer-review

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@article{e52a474890564f5bad7102027c557652,
title = "Influence of electron irradiation of the NOVER-1 vacuum resist on its resistance to ion-beam etching",
author = "Koval, {Y I} and Victor Petrashov",
year = "1998",
month = jan,
language = "English",
volume = "43",
pages = "126--128",
journal = "TECHNICAL PHYSICS",
issn = "1063-7842",
publisher = "Maik Nauka-Interperiodica Publishing",
number = "1",

}

RIS

TY - JOUR

T1 - Influence of electron irradiation of the NOVER-1 vacuum resist on its resistance to ion-beam etching

AU - Koval, Y I

AU - Petrashov, Victor

PY - 1998/1

Y1 - 1998/1

M3 - Article

VL - 43

SP - 126

EP - 128

JO - TECHNICAL PHYSICS

JF - TECHNICAL PHYSICS

SN - 1063-7842

IS - 1

ER -