Influence of electron irradiation of the NOVER-1 vacuum resist on its resistance to ion-beam etching. / Koval, Y I ; Petrashov, Victor.

In: TECHNICAL PHYSICS, Vol. 43, No. 1, 01.1998, p. 126-128.

Research output: Contribution to journalArticle

Published
Original languageEnglish
Pages (from-to)126-128
Number of pages3
JournalTECHNICAL PHYSICS
Volume43
Issue number1
Publication statusPublished - Jan 1998

ID: 577179