HYDROGEN CONCENTRATION AND MASS DENSITY OF DIAMOND-LIKE CARBON-FILMS OBTAINED BY X-RAY AND NEUTRON REFLECTIVITY

E FINDEISEN, R FEIDENHANS, M E VIGILD, K N CLAUSEN, J B HANSEN, M D BENTZON, J P GOFF

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)4636-4642
Number of pages7
JournalJournal of Applied Physics
Volume76
Issue number8
Publication statusPublished - 15 Oct 1994

Keywords

  • AMORPHOUS-CARBON
  • GROWTH

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