Fabrication of microfluidic cavities using Si-to-glass anodic bonding. / Zhelev, N.; Abhilash, T. S.; Bennett, R. G.; Smith, E. N.; Ilic, B.; Parpia, J. M.; Levitin, L. V.; Rojas, X.; Casey, A.; Saunders, J.

In: Review of Scientific Instruments, Vol. 89, No. 7, 073902, 2018, p. 1-10.

Research output: Contribution to journalArticlepeer-review

Published

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Fabrication of microfluidic cavities using Si-to-glass anodic bonding. / Zhelev, N.; Abhilash, T. S.; Bennett, R. G.; Smith, E. N.; Ilic, B.; Parpia, J. M.; Levitin, L. V.; Rojas, X.; Casey, A.; Saunders, J.

In: Review of Scientific Instruments, Vol. 89, No. 7, 073902, 2018, p. 1-10.

Research output: Contribution to journalArticlepeer-review

Harvard

Zhelev, N, Abhilash, TS, Bennett, RG, Smith, EN, Ilic, B, Parpia, JM, Levitin, LV, Rojas, X, Casey, A & Saunders, J 2018, 'Fabrication of microfluidic cavities using Si-to-glass anodic bonding', Review of Scientific Instruments, vol. 89, no. 7, 073902, pp. 1-10. https://doi.org/10.1063/1.5031837

APA

Vancouver

Zhelev N, Abhilash TS, Bennett RG, Smith EN, Ilic B, Parpia JM et al. Fabrication of microfluidic cavities using Si-to-glass anodic bonding. Review of Scientific Instruments. 2018;89(7):1-10. 073902. https://doi.org/10.1063/1.5031837

Author

Zhelev, N. ; Abhilash, T. S. ; Bennett, R. G. ; Smith, E. N. ; Ilic, B. ; Parpia, J. M. ; Levitin, L. V. ; Rojas, X. ; Casey, A. ; Saunders, J. / Fabrication of microfluidic cavities using Si-to-glass anodic bonding. In: Review of Scientific Instruments. 2018 ; Vol. 89, No. 7. pp. 1-10.

BibTeX

@article{e4c1b3260d5444d3932bba97d4c6db7a,
title = "Fabrication of microfluidic cavities using Si-to-glass anodic bonding",
author = "N. Zhelev and Abhilash, {T. S.} and Bennett, {R. G.} and Smith, {E. N.} and B. Ilic and Parpia, {J. M.} and Levitin, {L. V.} and X. Rojas and A. Casey and J. Saunders",
year = "2018",
doi = "10.1063/1.5031837",
language = "English",
volume = "89",
pages = "1--10",
journal = "Review of Scientific Instruments",
issn = "0034-6748",
publisher = "American Institute of Physics Publising LLC",
number = "7",

}

RIS

TY - JOUR

T1 - Fabrication of microfluidic cavities using Si-to-glass anodic bonding

AU - Zhelev, N.

AU - Abhilash, T. S.

AU - Bennett, R. G.

AU - Smith, E. N.

AU - Ilic, B.

AU - Parpia, J. M.

AU - Levitin, L. V.

AU - Rojas, X.

AU - Casey, A.

AU - Saunders, J.

PY - 2018

Y1 - 2018

UR - http://www.scopus.com/inward/record.url?scp=85050003954&partnerID=8YFLogxK

U2 - 10.1063/1.5031837

DO - 10.1063/1.5031837

M3 - Article

AN - SCOPUS:85050003954

VL - 89

SP - 1

EP - 10

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

SN - 0034-6748

IS - 7

M1 - 073902

ER -