Fabrication of microfluidic cavities using Si-to-glass anodic bonding. / Zhelev, N.; Abhilash, T. S.; Bennett, R. G.; Smith, E. N.; Ilic, B.; Parpia, J. M.; Levitin, L. V.; Rojas, X.; Casey, A.; Saunders, J.

In: Review of Scientific Instruments, Vol. 89, No. 7, 073902, 2018, p. 1-10.

Research output: Contribution to journalArticle

Published
Original languageEnglish
Article number073902
Pages (from-to)1-10
Number of pages10
JournalReview of Scientific Instruments
Volume89
Issue number7
Early online date13 Jul 2018
DOIs
Publication statusPublished - 2018
This open access research output is licenced under a Creative Commons Attribution-NonCommercial-NoDerivs 3.0 Unported License.

ID: 30916982