Fabrication of microfluidic cavities using Si-to-glass anodic bonding. / Zhelev, N.; Abhilash, T. S.; Bennett, R. G.; Smith, E. N.; Ilic, B.; Parpia, J. M.; Levitin, L. V.; Rojas, X.; Casey, A.; Saunders, J.
In: Review of Scientific Instruments, Vol. 89, No. 7, 073902, 2018, p. 1-10.Research output: Contribution to journal › Article › peer-review
Original language | English |
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Article number | 073902 |
Pages (from-to) | 1-10 |
Number of pages | 10 |
Journal | Review of Scientific Instruments |
Volume | 89 |
Issue number | 7 |
Early online date | 13 Jul 2018 |
DOIs | |
Publication status | Published - 2018 |
ID: 30916982