Fabrication of microfluidic cavities using Si-to-glass anodic bonding. / Zhelev, N.; Abhilash, T. S.; Bennett, R. G.; Smith, E. N.; Ilic, B.; Parpia, J. M.; Levitin, L. V.; Rojas, X.; Casey, A.; Saunders, J.
In: Review of Scientific Instruments, Vol. 89, No. 7, 073902, 2018, p. 1-10.Research output: Contribution to journal › Article › peer-review
Published
| Original language | English |
|---|---|
| Article number | 073902 |
| Pages (from-to) | 1-10 |
| Number of pages | 10 |
| Journal | Review of Scientific Instruments |
| Volume | 89 |
| Issue number | 7 |
| Early online date | 13 Jul 2018 |
| DOIs | |
| Publication status | Published - 2018 |
This open access research output is licenced under a Creative Commons Attribution-NonCommercial-NoDerivs 3.0 Unported License.
ID: 30916982