DIRECT SUBMICRON TOPOGRAPHY IN THE RASTER ELECTRON-MICROSCOPE

A V BEZRUKOV, A K GEIM, S V DUBONOS, Victor Petrashov

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)971-974
Number of pages4
JournalPISMA V ZHURNAL TEKHNICHESKOI FIZIKI
Volume13
Issue number16
Publication statusPublished - 26 Aug 1987

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