CUBIC BORON-NITRIDE FILMS DEPOSITED BY ELECTRON-CYCLOTRON RESONANCE PLASMA

S Y SHAPOVAL, Victor Petrashov, O A POPOV, A O WESTNER, M D YODER, C K C LOK

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)1885-1886
Number of pages2
JournalApplied Physics Letters
Volume57
Issue number18
Publication statusPublished - 29 Oct 1990

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