CUBIC BORON-NITRIDE FILMS DEPOSITED BY ELECTRON-CYCLOTRON RESONANCE PLASMA. / SHAPOVAL, S Y ; Petrashov, Victor; POPOV, O A ; WESTNER, A O ; YODER, M D ; LOK, C K C .

In: Applied Physics Letters, Vol. 57, No. 18, 29.10.1990, p. 1885-1886.

Research output: Contribution to journalArticle

Published
Original languageEnglish
Pages (from-to)1885-1886
Number of pages2
JournalApplied Physics Letters
Volume57
Issue number18
Publication statusPublished - 29 Oct 1990

ID: 578189