Noninvasive Micrometer-Scale Particle-Beam Size Measurement Using Optical Diffraction Radiation in the Ultraviolet Wavelength Range

Michele Bergamaschi; A. Aryshev; Pavel Karataev; Robert Kieffer; Thibaut Lefevre; Stefano Mazzoni; Nobuhiro Terunuma; R. Yang

doi:10.1103/PhysRevApplied.13.014041

Noninvasive Micrometer-Scale Particle-Beam Size Measurement Using Optical Diffraction Radiation in the Ultraviolet Wavelength Range

Michele Bergamaschi
, A. Aryshev
, Pavel Karataev
, Robert Kieffer
, Thibaut Lefevre
, Stefano Mazzoni
, Nobuhiro Terunuma
, R. Yang

Research output: Contribution to journal › Article › peer-review

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Original language	English
Article number	014041
Pages (from-to)	1-13
Number of pages	13
Journal	Physical Review Applied
Volume	13
Issue number	1
DOIs	https://doi.org/10.1103/PhysRevApplied.13.014041
Publication status	Published - 23 Jan 2020

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10.1103/PhysRevApplied.13.014041Licence: CC BY

Cite this

@article{548881e7de0046e7ba8c572712270e2a,

title = "Noninvasive Micrometer-Scale Particle-Beam Size Measurement Using Optical Diffraction Radiation in the Ultraviolet Wavelength Range",

author = "Michele Bergamaschi and A. Aryshev and Pavel Karataev and Robert Kieffer and Thibaut Lefevre and Stefano Mazzoni and Nobuhiro Terunuma and R. Yang",

year = "2020",

month = jan,

day = "23",

doi = "10.1103/PhysRevApplied.13.014041",

language = "English",

volume = "13",

pages = "1--13",

journal = "Physical Review Applied",

issn = "2331-7019",

publisher = "American Physical Society",

number = "1",

}

TY - JOUR

T1 - Noninvasive Micrometer-Scale Particle-Beam Size Measurement Using Optical Diffraction Radiation in the Ultraviolet Wavelength Range

AU - Bergamaschi, Michele

AU - Aryshev, A.

AU - Karataev, Pavel

AU - Kieffer, Robert

AU - Lefevre, Thibaut

AU - Mazzoni, Stefano

AU - Terunuma, Nobuhiro

AU - Yang, R.

PY - 2020/1/23

Y1 - 2020/1/23

U2 - 10.1103/PhysRevApplied.13.014041

DO - 10.1103/PhysRevApplied.13.014041

M3 - Article

SN - 2331-7019

VL - 13

SP - 1

EP - 13

JO - Physical Review Applied

JF - Physical Review Applied

IS - 1

M1 - 014041

ER -