Noninvasive Micrometer-Scale Particle-Beam Size Measurement Using Optical Diffraction Radiation in the Ultraviolet Wavelength Range

Michele Bergamaschi, A. Aryshev, Pavel Karataev, Robert Kieffer, Thibaut Lefevre, Stefano Mazzoni, Nobuhiro Terunuma, R. Yang

Research output: Contribution to journalArticlepeer-review

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Original languageEnglish
Article number014041
Pages (from-to)1-13
Number of pages13
JournalPhysical Review Applied
Issue number1
Publication statusPublished - 23 Jan 2020

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