| Original language | English |
|---|---|
| Pages (from-to) | 357-359 |
| Number of pages | 3 |
| Journal | MICROELECTRONIC ENGINEERING |
| Volume | 35 |
| Issue number | 1-4 |
| Publication status | Published - Feb 1997 |
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Nanofabrication using self-narrowing atomic beams
Research output: Contribution to journal › Article › peer-review