Influence of electron irradiation of the NOVER-1 vacuum resist on its resistance to ion-beam etching

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Cite this

@article{e52a474890564f5bad7102027c557652,

title = "Influence of electron irradiation of the NOVER-1 vacuum resist on its resistance to ion-beam etching",

author = "Koval, \{Y I\} and Victor Petrashov",

year = "1998",

month = jan,

language = "English",

volume = "43",

pages = "126--128",

journal = "TECHNICAL PHYSICS",

issn = "1063-7842",

publisher = "Pleiades Publishing",

number = "1",

}