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HYDROGEN CONCENTRATION AND MASS DENSITY OF DIAMOND-LIKE CARBON-FILMS OBTAINED BY X-RAY AND NEUTRON REFLECTIVITY

  • E FINDEISEN
  • , R FEIDENHANS
  • , M E VIGILD
  • , K N CLAUSEN
  • , J B HANSEN
  • , M D BENTZON
  • , J P GOFF

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)4636-4642
Number of pages7
JournalJournal of Applied Physics
Volume76
Issue number8
Publication statusPublished - 15 Oct 1994

Keywords

  • AMORPHOUS-CARBON
  • GROWTH

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