@article{e4c1b3260d5444d3932bba97d4c6db7a,
title = "Fabrication of microfluidic cavities using Si-to-glass anodic bonding",
author = "N. Zhelev and Abhilash, \{T. S.\} and Bennett, \{R. G.\} and Smith, \{E. N.\} and B. Ilic and Parpia, \{J. M.\} and Levitin, \{L. V.\} and X. Rojas and A. Casey and J. Saunders",
year = "2018",
doi = "10.1063/1.5031837",
language = "English",
volume = "89",
pages = "1--10",
journal = "Review of Scientific Instruments",
issn = "0034-6748",
publisher = "American Institute of Physics",
number = "7",
}