Fabrication of microfluidic cavities using Si-to-glass anodic bonding

N. Zhelev; T. S. Abhilash; R. G. Bennett; E. N. Smith; B. Ilic; J. M. Parpia; L. V. Levitin; X. Rojas; A. Casey; J. Saunders

doi:10.1063/1.5031837

Fabrication of microfluidic cavities using Si-to-glass anodic bonding

N. Zhelev, T. S. Abhilash, R. G. Bennett, E. N. Smith, B. Ilic, J. M. Parpia, L. V. Levitin, X. Rojas, A. Casey, J. Saunders

Department of Physics

Research output: Contribution to journal › Article › peer-review

Original language	English
Article number	073902
Pages (from-to)	1-10
Number of pages	10
Journal	Review of Scientific Instruments
Volume	89
Issue number	7
Early online date	13 Jul 2018
DOIs	https://doi.org/10.1063/1.5031837
Publication status	Published - 2018

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10.1063/1.5031837

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title = "Fabrication of microfluidic cavities using Si-to-glass anodic bonding",

author = "N. Zhelev and Abhilash, \{T. S.\} and Bennett, \{R. G.\} and Smith, \{E. N.\} and B. Ilic and Parpia, \{J. M.\} and Levitin, \{L. V.\} and X. Rojas and A. Casey and J. Saunders",

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AU - Zhelev, N.

AU - Abhilash, T. S.

AU - Bennett, R. G.

AU - Smith, E. N.

AU - Ilic, B.

AU - Parpia, J. M.

AU - Levitin, L. V.

AU - Rojas, X.

AU - Casey, A.

AU - Saunders, J.

PY - 2018

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UR - https://www.scopus.com/pages/publications/85050003954

U2 - 10.1063/1.5031837

DO - 10.1063/1.5031837

M3 - Article

AN - SCOPUS:85050003954

SN - 0034-6748

VL - 89

SP - 1

EP - 10

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

IS - 7

M1 - 073902

ER -

Fabrication of microfluidic cavities using Si-to-glass anodic bonding

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