DIRECT SUBMICRON TOPOGRAPHY IN THE RASTER ELECTRON-MICROSCOPE

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	971-974
Number of pages	4
Journal	PISMA V ZHURNAL TEKHNICHESKOI FIZIKI
Volume	13
Issue number	16
Publication status	Published - 26 Aug 1987

Cite this

@article{3dcf19d12b4148808dc2a54b3da4fc18,

title = "DIRECT SUBMICRON TOPOGRAPHY IN THE RASTER ELECTRON-MICROSCOPE",

author = "BEZRUKOV, \{A V\} and GEIM, \{A K\} and DUBONOS, \{S V\} and Victor Petrashov",

year = "1987",

month = aug,

day = "26",

language = "English",

volume = "13",

pages = "971--974",

journal = "PISMA V ZHURNAL TEKHNICHESKOI FIZIKI",

issn = "0320-0116",

number = "16",

}