CUBIC BORON-NITRIDE FILMS DEPOSITED BY ELECTRON-CYCLOTRON RESONANCE PLASMA

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	1093-1097
Number of pages	5
Journal	NEW DIAMOND SCIENCE AND TECHNOLOGY
Publication status	Published - 1991

Cite this

@article{2b50ed12d9d04122ba04abd00b8c60a9,

title = "CUBIC BORON-NITRIDE FILMS DEPOSITED BY ELECTRON-CYCLOTRON RESONANCE PLASMA",

author = "SHAPOVAL, \{S Y\} and Victor Petrashov and POPOV, \{O A\} and WESTNER, \{A O\} and YODER, \{M D\} and LOK, \{C K C\}",

year = "1991",

language = "English",

pages = "1093--1097",

journal = "NEW DIAMOND SCIENCE AND TECHNOLOGY",

}