CUBIC BORON-NITRIDE FILMS DEPOSITED BY ELECTRON-CYCLOTRON RESONANCE PLASMA

S Y SHAPOVAL, Victor Petrashov, O A POPOV, A O WESTNER, M D YODER, C K C LOK

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	1093-1097
Number of pages	5
Journal	NEW DIAMOND SCIENCE AND TECHNOLOGY
Publication status	Published - 1991

Cite this

@article{2b50ed12d9d04122ba04abd00b8c60a9,

title = "CUBIC BORON-NITRIDE FILMS DEPOSITED BY ELECTRON-CYCLOTRON RESONANCE PLASMA",

author = "SHAPOVAL, {S Y} and Victor Petrashov and POPOV, {O A} and WESTNER, {A O} and YODER, {M D} and LOK, {C K C}",

year = "1991",

language = "English",

pages = "1093--1097",

journal = "NEW DIAMOND SCIENCE AND TECHNOLOGY",

}