CUBIC BORON-NITRIDE FILMS DEPOSITED BY ELECTRON-CYCLOTRON RESONANCE PLASMA

S Y SHAPOVAL, Victor Petrashov, O A POPOV, A O WESTNER, M D YODER, C K C LOK

Research output: Contribution to journal › Article › peer-review

Cite this

@article{bff512a2f6574dbf835d1923eca88b24,

title = "CUBIC BORON-NITRIDE FILMS DEPOSITED BY ELECTRON-CYCLOTRON RESONANCE PLASMA",

author = "SHAPOVAL, \{S Y\} and Victor Petrashov and POPOV, \{O A\} and WESTNER, \{A O\} and YODER, \{M D\} and LOK, \{C K C\}",

year = "1990",

month = oct,

day = "29",

language = "English",

volume = "57",

pages = "1885--1886",

journal = "Applied Physics Letters",

issn = "1077-3118",

publisher = "American Institute of Physics",

number = "18",

}