CUBIC BORON-NITRIDE FILMS DEPOSITED BY ELECTRON-CYCLOTRON RESONANCE PLASMA

S Y SHAPOVAL, Victor Petrashov, O A POPOV, A O WESTNER, M D YODER, C K C LOK

Research output: Contribution to journal › Article › peer-review

Cite this

@article{bff512a2f6574dbf835d1923eca88b24,

title = "CUBIC BORON-NITRIDE FILMS DEPOSITED BY ELECTRON-CYCLOTRON RESONANCE PLASMA",

author = "SHAPOVAL, {S Y} and Victor Petrashov and POPOV, {O A} and WESTNER, {A O} and YODER, {M D} and LOK, {C K C}",

year = "1990",

month = oct,

day = "29",

language = "English",

volume = "57",

pages = "1885--1886",

journal = "Applied Physics Letters",

issn = "1077-3118",

publisher = "American Institute of Physics Publising LLC",

number = "18",

}