@article{5ff19bf9757240229c3031e429b0f4a5,
title = "Anodically bonded submicron microfluidic chambers",
keywords = "anodisation, electrodes, microfluidics, silicon, silicon compounds, SUPERFLUID HE-3, SURFACES, SILICON",
author = "S. Dimov and Bennett, \{R. G.\} and A. C{\'o}rcoles and Levitin, \{L. V.\} and B. Ilic and Verbridge, \{S. S.\} and J. Saunders and A. Casey and Parpia, \{J. M.\}",
year = "2010",
month = jan,
day = "29",
doi = "10.1063/1.3291107",
language = "English",
volume = "81",
journal = "Review of Scientific Instruments",
issn = "0034-6748",
publisher = "American Institute of Physics",
number = "1",
}