A STUDY COMPARING MEASUREMENTS OF ROUGHNESS OF SILICON AND SIO2 SURFACES AND INTERFACES USING SCANNING PROBE MICROSCOPY AND NEUTRON REFLECTIVITY

A  CROSSLEY; C J  SOFIELD; J P  GOFF; A C I  LAKE; M T  HUTCHINGS; A  MENELLE

A STUDY COMPARING MEASUREMENTS OF ROUGHNESS OF SILICON AND SIO2 SURFACES AND INTERFACES USING SCANNING PROBE MICROSCOPY AND NEUTRON REFLECTIVITY

A CROSSLEY
, C J SOFIELD
, J P GOFF
, A C I LAKE
, M T HUTCHINGS
, A MENELLE

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	221-226
Number of pages	6
Journal	Journal of non-Crystalline solids
Volume	187
Publication status	Published - Jul 1995

Keywords

TUNNELING MICROSCOPY
OXIDE SURFACES
SI(111)
HF

Cite this

@article{ce19ddec0b74477bae9c48a90a9f9966,

title = "A STUDY COMPARING MEASUREMENTS OF ROUGHNESS OF SILICON AND SIO2 SURFACES AND INTERFACES USING SCANNING PROBE MICROSCOPY AND NEUTRON REFLECTIVITY",

keywords = "TUNNELING MICROSCOPY, OXIDE SURFACES, SI(111), HF",

author = "A CROSSLEY and SOFIELD, \{C J\} and GOFF, \{J P\} and LAKE, \{A C I\} and HUTCHINGS, \{M T\} and A MENELLE",

year = "1995",

month = jul,

language = "English",

volume = "187",

pages = "221--226",

journal = "Journal of non-Crystalline solids",

issn = "0022-3093",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - A STUDY COMPARING MEASUREMENTS OF ROUGHNESS OF SILICON AND SIO2 SURFACES AND INTERFACES USING SCANNING PROBE MICROSCOPY AND NEUTRON REFLECTIVITY

AU - CROSSLEY, A

AU - SOFIELD, C J

AU - GOFF, J P

AU - LAKE, A C I

AU - HUTCHINGS, M T

AU - MENELLE, A

PY - 1995/7

Y1 - 1995/7

KW - TUNNELING MICROSCOPY

KW - OXIDE SURFACES

KW - SI(111)

KW - HF

M3 - Article

SN - 0022-3093

VL - 187

SP - 221

EP - 226

JO - Journal of non-Crystalline solids

JF - Journal of non-Crystalline solids

ER -